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3-0298 (technical revision)
Principal Analysts: Christian Gregor Dieseldorff and Clark Tseng
Similar requirements and options covering load ports for wafers are covered in SEMI E15 (for 200 mm wafers and smaller) and in SEMI E15
本仕様は，ファクトリアプリケーションと装置の時刻値および時刻同期状態にアクセスするためのClockオブジェクトを定義し，ネットワーク時刻同期アーキテクチャの例を記述し，ネットワーク通信を利用するファクトリ環境において正確な時刻同期のクロックのために使用するプロトコルを規定する。
it is important that this information is available to ensure additional process steps are performed correctly
D05500 - SEMI D55 - カラーフィルタ用カラー性能の評価方法（色純度の評価方法）のガイド StdPbc-0426 3-0298 (technical revision)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Flat Panel Display Materials & Components Global Technical Committee20091216global Audits and Reviews Subcommittee20102www. semi. org NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain
