C00326 - SEMI C3.26 - Specification for Tungsten Hexafluoride (WF6) in Cylinders, 99.8% Quality StdTpc-Process Chemicals - Miscellaneous 本スタンダードは，フラットパネルディスプレイの製造に使用されるガラス基板の所定の幾何学的要求事項を規定する。

本スタンダードは，フラットパネルディスプレイの製造に使用されるガラス基板の所定の幾何学的要求事項を規定する。

and wafer on wafer (WoW) to help accelerate the progress of 3DS-IC testing

The International System of Units (SI) is used as the standard unit of measure in this Document

originally published in 1983

notably for trace impurities

C00326 - SEMI C3.26 - Specification for Tungsten Hexafluoride (WF6) in Cylinders, 99.8% Quality StdTpc-Process Chemicals - Miscellaneous 本スタンダードは，フラットパネルディスプレイの製造に使用されるガラス基板の所定の幾何学的要求事項を規定する。NOTICE: This Document was balloted and approved for withdrawal in 2011. It was replaced by SEMI C70. Tungsten hexafluoride is a colorless gas or colorless liquid. It is shipped as a liquefied gas under its own vapor pressure. Referenced SEMI Standards (purchase separately) None. Revision History SEMI C3. 26 0301 (Withdrawn 0312, replaced by SEMI C70) SEMI C3. 26 0301 (technical revision) SEMI C3. 26 94 (technical revision) SEMI C3. 26 93 (technical