E13000 - SEMI E130 - Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) Revision:SEMI E130-0618 (Reapproved 0723) - Current The purpose of this Test

The purpose of this Test Method is to quantify a nominal average conversion factor from one gas to another for a mass flow controller (MFC) and to quantify the conversion factor as function of flow for an MFC

this Standard can be applied to RF power deliver systems used in similar processing equipment for other high-tech industries (e

SEMI MF671 — Test Method for Measuring Flat Length on Wafers of Silicon and Other Electronic Materials

This Test Method defines an evaluation method for EFFU which is installed inside an enclosed space to remove particles that are generated inside process equipment

2-0698 (first published)

E13000 - SEMI E130 - Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) Revision:SEMI E130-0618 (Reapproved 0723) - Current The purpose of this TestThis Standard establishes a Prober Specific Equipment Model for prober equipment deployed in a factory adhering to the Global Joint Guidance for 300 mm Standards (PSEM300). The PSEM300 consists of equipment characteristics and behaviors that apply to this class of equipment and are required to be implemented. The intent of this Standard is to facilitate the integration of prober equipment into an automated semiconductor factory. This Standard