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3および
Changes were made to ¶ 11
This Standard establishes implementation guidelines for the measurement of visual appearance
SEMI D46-0706 (first published)
and Availability of Equipment
D01600 - SEMI D16 - FPDマテリアルハンドリングシステムとツールポート間の機械的インタフェース仕様 StdPbc-1122 3およびFlat Panel Display Equipment CommitteeNorth American Flat Panel Display Committee19987North American Regional Standards Committee19987SEMI On Line19989 FPD WIPAGV Referenced SEMI Standards SEMI D5 Standard Size for Flat Panel Display Substrates SEMI D11 Specification for Flat Panel Display Glass Substrate Cassettes
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