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M03400 - SEMI M34 - Guide for Specifying SIMOX Wafers Revision:SEMI M34-0299 (Withdrawn 0211) - Withdrawn - Historical This Practice includes preparation procedures

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Description

This Practice includes preparation procedures that can be applied to components such as tubing

This Standard specifies the purpose

This Guide provides recommendations for equipment static charge limits that are appropriate for the product being manufactured

it is impossible for this publication to provide definite statements related to the safe handling of individual liquid chemicals

本スタンダードは,global Information & Control Committeeで技術的に承認されている。現版は2008年11月19日,global Audits and Reviews Subcommitteeにて発行が承認された。2009年2月にwww

M03400 - SEMI M34 - Guide for Specifying SIMOX Wafers Revision:SEMI M34-0299 (Withdrawn 0211) - Withdrawn - Historical This Practice includes preparation procedures

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