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This Test Method does not cover acquisition of the thickness data array
the sample geometry and the quality of the spectrometer
SEMI D77-0618 (Reapproved 0224)
inspection procedures and acceptance criteria
This Document applies to hydrogen (H2) delivered through specialty gas systems at pressures up to 8 × 105 Pa (8 atmospheres)
E03700 - SEMI E37 - HSMS의 일반적 서비스(HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES) Revision:SEMI E37-0413 - Superseded This Test Method does notGlobal Information & Control Technical Committee , 2012 12 20 Global Audits and Reviews Subcommittee . 1995 2008 7 . 2013 4 www. semi. org . NOTICE : This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. , , . krstandards@semi. org . NOTICE: The designation of SEMI E37 was updated during the 0413
