P00500 - SEMI P5 - Specification for Pellicles StdPbc-0415 cosmetics or any material that

cosmetics or any material that may come in contact with the test material

The Guide does not apply to measurement systems used to control intermediate process steps during Si wafer manufacturing

本スタンダードでは，フレキシブルディスプレイ用のプラスチック基板に関する各用語について定義しそれを解釈することでフレキシブルディスプレイの製造において利用される材料・指標を提供するものとする。

Flow Curve

SEMI E5-1103 (technical revision)

P00500 - SEMI P5 - Specification for Pellicles StdPbc-0415 cosmetics or any material thatThis Specification covers the general requirements for pellicles used on photomasks or reticles in photolithographic exposure systems. This Specification covers pellicles for use in either broadband, polychromatic or monochromatic exposure systems. Referenced SEMI Standards (purchase separately) None. Revision History SEMI P5 0416 (Reapproved 1221) SEMI P5 0416 (technical revision) SEMI P5 0704 (technical revision) SEMI P5 94 (Reapproved 1103) SEMI P5