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SEMI MF673¾ Test Method for Measuring Resistivity of Semiconductor Wafers or Sheet Resistance of Semiconductor Films with a Noncontact Eddy Current Gauge
• Extension of recipe identification capability
1 — Specification for Product Time Measurement in GEM 300 Production Equipment
SEMI A1-1020 (technical revision)
SEMI E70-1213 (Reapproved 1021)
G08100 - SEMI G81 - Specification for Map Data Items StdPbc-0815 SEMI MF673¾ Test Method forThis Document describes the data items that relate to electronic substrate mapping. This Document applies only to substrate map data items. This Document does not address the transmission, file naming conventions, storage or archiving of substrate maps. The Specification of which data items are optional and which are required is not specified in this Document. The size of each data item described in this Document is maximum size. The actual size may
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