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others on back-surface illumination
electronic shelf labels
stacked chip on substrate (SCoS)
The data within scope of this Standard is any data that is retrievable from semiconductor equipment via electronic interfaces
CC-Link IE is a vendor independent
E13800 - SEMI E138 - Specification for XML Semiconductor Common Components Revision:SEMI E138-0217 - Superseded others on back-surface illuminationThis Document is a central location for the definition of common XML elements that are not specific to a single standard, but common across multiple standards. This Document defines the representation of Error, Data Types, Data Value Types, and Unit which are considered common components. The common components are used in association with other XML documents or schemas generated as part of the XML based SEMI Standard Interface Specifications.
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