F10000 - SEMI F100 - Compliance Test Method for Minimum Flow Coefficient of Diaphragm Valve for Metric PFA Tube StdTpc-Gas Source Equipment It should be noted that

It should be noted that there has been no direct correlation made between the results of this test method and contamination of process gases or product yields in processes served by high purity gas distribution systems

Electrostatic compatibility in the entire semiconductor factory is addressed in SEMI E129

SEMI E62-0703E2 (editorial revision)

フォークリフトピンホール　（2）

SEMI S2-0706b (delayed revision)

F10000 - SEMI F100 - Compliance Test Method for Minimum Flow Coefficient of Diaphragm Valve for Metric PFA Tube StdTpc-Gas Source Equipment It should be noted thatThis test method was technically approved by the Global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on March 11, 2005. It was available at www. semi. org in June 2005. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to