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This method can also be used for other applications outside of microelectronics
org in May 2016
mass flow controllers (MFCs)
org in March 2006
Maintenance
C00348 - SEMI C3.48 - Standard for Nitrogen (N2), Bulk Liquid, 99.9994% Quality Revision:SEMI C3.48-0200 (Withdrawn 0303) - Replaced This method can also beThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on October 19, 1999. Available at www. semi. org in February 2000; originally published in 1993; previously published in 1996. NOTICE: This Document was balloted and approved for withdrawal in 2003; it has been replaced by SEMI C59. Nitrogen is an odorless, tasteless, diatomic gas
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