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These requirements are consistent with the requirements of SEMI M45
SEMI 3D9-0914 (first published)
目的（第1節）
stacking faults
製品，またはレチクル
E07400 - SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps StdTpc-Equipment Models These requirements are consistent withNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard specifies the physical and electrical interfaces for turbomolecular pump (TMP) type vacuum pumps. Standardization of pump interfaces will allow for interchangeability of pumps. Device manufacturers use this
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