P04200 - SEMI P42 - Specification of Reticle Data for Automatic Recipe Transfer to Wafer Exposure System Revision:SEMI P42-0304 - Inactive use of or logic associated

use of or logic associated with the defined physical features are given in this Specification

The scope of this Specification is to define:

This Standard specifies the purpose

3  The communications services defined here enable standards-based interoperability of independent systems

SEMI MF1390-0707 (Reapproved 0512)

P04200 - SEMI P42 - Specification of Reticle Data for Automatic Recipe Transfer to Wafer Exposure System Revision:SEMI P42-0304 - Inactive use of or logic associatedThis specification was technically approved by the Global Micropatterning Committee and is the direct responsibility of the Japanese Micropatterning Committee. Current edition approved by the Japanese Regional Standards Committee on January 9, 2004. Initially available at www. semi. org February 2004; to be published March 2004. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not