E14600 - SEMI E146 - Test Method for the Determination of Particulate Contamination from Minienvironments used for Storage and Transport of Silicon Wafers Revision:SEMI E146-0306 - Inactive This Test Method characterizes cracks

This Test Method characterizes cracks in single or multicrystalline Si wafers

8-0698 (Reapproved 0615)

SEMI MF42-1105 (technical revision)

This standard falls under the general specification

• To provide a measurable level of data quality to ensure quality of service and/or quality of performance of applications used by equipment suppliers

E14600 - SEMI E146 - Test Method for the Determination of Particulate Contamination from Minienvironments used for Storage and Transport of Silicon Wafers Revision:SEMI E146-0306 - Inactive This Test Method characterizes cracksNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard defines a test method for the determination of particulate contamination from minienvironments used for storage and transport of silicon wafers in semiconductor manufacturing. The particulate contamination