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If the free carrier density is not too high
SEMI MF1618-1110 (Reapproved 0322)
Wafer near-edge geometry can significantly affect the yield of semiconductor device processing
It is not intended for dark-field illumination
detailed in SEMI M45
E03500 - SEMI E35 - 半導体製造装置のCOO測定方法の計算ガイド StdPbc-0213 If the free carrier densityglobal Metrics Technical Committee20111224global Audits and Reviews Subcommittee20123www. semiviews. org www. semi. org199520073 COOcomprehensive cost of ownershipCOOconstrained cost of ownershipCOOmonitor cost of ownershipEHS ICFPDPVMEMSLEDHB LEDHDD COO COO Referenced SEMI Standards SEMI E10 Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization SEMI E81 Provisional Specification
