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SEMI E172 — Specification for SECS Equipment Data Dictionary (SEDD)
1-0307 (technical revision)
그 내용이 가지는 의미와 장비에서 지원하는 데이터가 어떤 인터페이스로 관리되는지를 정의한다
such as pellets of perfluoroalkoxy (PFA)
or hazardous chemicals
F00500 - SEMI F5 - ガス状廃棄物処理のガイドライン StdPbc-0120 SEMI E172 — Specification forNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Environmental Health and Safety CommitteeNorth American Environmental Health & Safety Committee2001827North American Regional Standards Committee20019www. semi. org2001111990 NOTICE: This Standard or Safety Guideline has an
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