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SEMI E16-90 (Reapproved 0699)
Most of the requirements given in this specification are in the form of maximum or minimum dimensions with very few required surfaces
SEMI E92-0523 (technical revision)
· Transfer of general-purpose data between equipment
1 — Standard for Sensor/Actuator Network Common Device Model
D00600 - SEMI D6 - Specification for Flat Panel Display (FPD) Mask Substrates Revision:SEMI D6-0305 - Superseded SEMI E16-90 (Reapproved 0699)This Specification defines the standard for substrates used to fabricate flat panel display masks. This Specification applies to photomasks that are principally used in fabricating flat panel displays. The edge lengths specified range from 202. 8 mm 202. 8 mm to 1620 mm 1780 mm. Substrates with an edge length less than 200 mm follow the specifications for a semiconductor mask (refer to SEMI P1). Referenced SEMI Standards (purchase separately) SEMI P1
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