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MF145100 - SEMI MF1451 - Test Method for Measuring Sori on Silicon Wafers by Automated Noncontact Scanning Revision:SEMI MF1451-0707 (Reapproved 0421) - Current This Document defines a method

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Description

This Document defines a method of testing the interior surfaces of stainless steel tubing

EPT enables factory engineers to obtain directly from the equipment the reasons why the equipment or module is prevented from performing

This Document defines three orthogonal reference planes as references for carrier dimensions

This activity shall develop a new specification of indoor lighting simulator requirements for performance measurement of emerging PV and device qualification

This Test Method is independent of surface finish

MF145100 - SEMI MF1451 - Test Method for Measuring Sori on Silicon Wafers by Automated Noncontact Scanning Revision:SEMI MF1451-0707 (Reapproved 0421) - Current This Document defines a methodSori can significantly affect the yield of semiconductor device processing. Knowledge of this characteristic can help the producer and consumer determine if the dimensional characteristics of a specimen wafer satisfy given geometrical requirements. Changes in wafer sori during processing can adversely affect subsequent handling and processing steps. These changes can also provide an important process monitoring function. This Test Method is suitable

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