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SEMI MF1618-1110 (Reapproved 1115)
SEMI MF1569-0307 (Reapproved 0512)
This standard specifies the cas settes used to horizontally transport and store glass substrates 0
any surface damage produced during sample preparation is to be excluded from such assessment
a layer must be thicker than the depletion depth corresponding to an applied voltage of 2 V
S02900 - SEMI S29 - 불소계 온실가스(F-GHG) 배출 특성 표시 및 저감을 위한 가이드 Revision:SEMI S29-0712 - Inactive SEMI MF1618-1110 (Reapproved 1115), (Environmental, Health & Safety Committee) . (Audits and Reviews Subcommittee) 2012 6 18 2012 7 www. semiviews. org www. semi. org . NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any language, the English version is the official and authoritative version. : , , . krstandards@semi. org. . (ME) (F GHG) . (abatement tool) F GHG (DRE) . ME (abatement tool) . (GHG) CF4,
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